The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Feb. 12, 2010
Hirohisa Takahashi, Sammu, JP;
Isao Sugiura, Sammu, JP;
Atsushi Ohta, Sammu, JP;
Satoru Ishibashi, Sammu, JP;
Hirohisa Takahashi, Sammu, JP;
Isao Sugiura, Sammu, JP;
Atsushi Ohta, Sammu, JP;
Satoru Ishibashi, Sammu, JP;
Ulvac, Inc., Chigasaki-shi, JP;
Abstract
Exfoliation of an etching stopper is prevented. A color filter of the present invention includes an inorganic protection film (etching stopper) composed mainly of SnO. Since the inorganic protection film as such not only has a high specific resistance but also has a linear expansion coefficient close to the linear expansion coefficient of a transparent electrode, the inorganic protection film is not exfoliated from the transparent electrode or the resin layer even if an object to be processed is heated. Since the inorganic protection film and the transparent electrode can be formed in the same film forming chamber, the time required to produce the color filter can be shortened as compared to in the conventional technique.