The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 16, 2011

Filed:

May. 14, 2009
Applicants:

Jun Yuan, Hopewell Junction, NY (US);

Dureseti Chidambarrao, Hopewell Junction, NY (US);

Sunfei Fang, Hopewell Junction, NY (US);

Yue Liang, Hopewell Junction, NY (US);

Haizhou Yin, Hopewell Junction, NY (US);

Xiaojun Yu, Hopewell Junction, NY (US);

Inventors:

Jun Yuan, Hopewell Junction, NY (US);

Dureseti Chidambarrao, Hopewell Junction, NY (US);

Sunfei Fang, Hopewell Junction, NY (US);

Yue Liang, Hopewell Junction, NY (US);

Haizhou Yin, Hopewell Junction, NY (US);

Xiaojun Yu, Hopewell Junction, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/70 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor structure is provided that includes an asymmetric gate stack located on a surface of high k gate dielectric. The asymmetric gate stack includes a first portion and a second portion, wherein the first portion has a different threshold voltage than the second portion. The first portion of the inventive asymmetric gate stack includes, from bottom to top, a threshold voltage adjusting material and at least a first conductive spacer, while the second portion of the inventive asymmetric gate stack includes at least a second conductive spacer over the gate dielectric. In some embodiments, the second conductive spacer is in direct contact with the underlying high k gate dielectric, while in other embodiments, in which the first and second conductive spacers are comprised of different conductive materials, the base of the second conductive spacer is in direct contact with the threshold adjusting material.


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