The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Oct. 21, 2009
Richard L. Sandstrom, Encinitas, CA (US);
William N. Partlo, Poway, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Bryan G. Moosman, San Marcos, CA (US);
Tae H. Chung, Murrieta, CA (US);
Thomas P. Duffey, San Diego, CA (US);
James J. Ferrell, Temecula, CA (US);
Terance Hilsabeck, San Marcos, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
William N. Partlo, Poway, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Bryan G. Moosman, San Marcos, CA (US);
Tae H. Chung, Murrieta, CA (US);
Thomas P. Duffey, San Diego, CA (US);
James J. Ferrell, Temecula, CA (US);
Terance Hilsabeck, San Marcos, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
One aspect of the disclosed subject matter describes a gas discharge laser chamber. The gas discharge laser chamber includes a discharge region formed between a first electrode and a second electrode, a tangential fan for circulating gas through the discharge region, wherein the fan is proximate to an input side of the discharge region, an input side acoustic baffle proximate to the input side of the discharge region. The input side acoustic baffle includes a vanishing point leading edge, a vanishing point trailing edge, a gas flow smoothing offset surface aligning a gas flow from a surface of the input side acoustic baffle to an input side of a cathode support in the discharge region, a plurality of ridges separated by a plurality of trenches, wherein the plurality of ridges and the plurality of trenches are aligned with a direction of gas flow through the discharge region and wherein the plurality of ridges have a random pitch between about 0.3 and about 0.7 inch.