The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Oct. 21, 2008
Toshiyuki Matsumoto, Hyogo, JP;
Tomohide Minami, Hyogo, JP;
Koji Mahara, Kumamoto, JP;
Yuichi Douki, Kumamoto, JP;
Toshiyuki Matsumoto, Hyogo, JP;
Tomohide Minami, Hyogo, JP;
Koji Mahara, Kumamoto, JP;
Yuichi Douki, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A transfer point of a transfer arm is detected accurately and stably by using a position detecting wafer having an electrostatic capacitance sensor. A position detecting wafer S is formed in a wafer shape transferable by a transfer armand includes an electrostatic capacitance sensorfor detecting a relative position with respect to a reference object by detecting an electrostatic capacitance in relation with the reference object for a position detection. The electrostatic capacitance sensorincludes a detection electrodefor forming the electrostatic capacitance in relation with the reference object, and the detection electrodeis installed on a rear surface of a main body of the wafer shape. Installed on the main body is a guard electrodecovering the detecting electrodewhen viewed from a front surface thereof, for blocking an electric field oriented toward the detection electrodefrom the front surface.