The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Sep. 19, 2008
Applicants:
Jeffrey Dysard, St. Charles, IL (US);
Sriram Anjur, Aurora, IL (US);
Steven Grumbine, Aurora, IL (US);
Daniela White, Oswego, IL (US);
William Ward, Glen Ellyn, IL (US);
Inventors:
Jeffrey Dysard, St. Charles, IL (US);
Sriram Anjur, Aurora, IL (US);
Steven Grumbine, Aurora, IL (US);
Daniela White, Oswego, IL (US);
William Ward, Glen Ellyn, IL (US);
Assignee:
Cabot Microelectronics Corporation, Aurora, IL (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
The inventive method comprises chemically-mechanically polishing a substrate with an inventive polishing composition comprising a liquid carrier, a cationic polymer, an acid, and abrasive particles that have been treated with an aminosilane compound.