The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2011

Filed:

Oct. 29, 2009
Applicants:

Johannes Antonius Maria Van Den Oetelaar, Eindhoven, NL;

Jorn Hermkens, Oss, NL;

Pleun Dona, Veldhoven, NL;

Frank Nederlof, Nuenen, NL;

Wim Wondergem, Best, NL;

Inventors:

Johannes Antonius Maria Van Den Oetelaar, Eindhoven, NL;

Jorn Hermkens, Oss, NL;

Pleun Dona, Veldhoven, NL;

Frank Nederlof, Nuenen, NL;

Wim Wondergem, Best, NL;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); G01N 35/10 (2006.01);
U.S. Cl.
CPC ...
Abstract

A charged-particle optical system () such as an electron microscope has a vacuum chamber () with a space () for accommodating a specific one () of multiple specimens in operational use. The charged-particle optical system has a loader () with a part () that is moveable into and out of the space. The part is configured for attaching a specimen carrier (), brought from outside the system, to a first holder () or to detach the carrier from the first holder and to remove the carrier from inside the system. The carrier accommodates a first specimen. The system has an interface () in a wall of the chamber for removably accommodating the first holder () or a second holder () with a second specimen () mounted thereon.


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