The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Mar. 11, 2008
Guoheng Zhao, Milpitas, CA (US);
George H. Zapalac, Jr., Santa Cruz, CA (US);
Samuel S. H. Ngai, San Francisco, CA (US);
Ady Levy, Sunnyvale, CA (US);
Mehdi Vaez-iravani, Los Gatos, CA (US);
Guoheng Zhao, Milpitas, CA (US);
George H. Zapalac, Jr., Santa Cruz, CA (US);
Samuel S. H. Ngai, San Francisco, CA (US);
Ady Levy, Sunnyvale, CA (US);
Mehdi Vaez-Iravani, Los Gatos, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An apparatus for both detecting and repairing a shunt defect in a solar cell substrate. A shunt detection module detects the shunt defect in the substrate, using at least one of lock-in thermography and current-voltage testing. A process diagnostic module determines whether the substrate should be passed without further processing by the apparatus, rejected without further processing by the apparatus, or repaired by the apparatus. A shunt repair module electrically isolates the shunt defect in the substrate. In this manner, a single apparatus can quickly check for shunts and make a determination as to whether the substrate is worth repairing. If it is worth repairing, then the apparatus can make the repairs to the substrate.