The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2011
Filed:
May. 31, 2006
Jens Kugler, Heubach, DE;
Ulrich Weber, Ulm, DE;
Bernhard Gellrich, Aalen, DE;
Yim-bun Patrick Kwan, Aalen, DE;
Peter Deufel, Aalen, DE;
Jens Kugler, Heubach, DE;
Ulrich Weber, Ulm, DE;
Bernhard Gellrich, Aalen, DE;
Yim-Bun Patrick Kwan, Aalen, DE;
Peter Deufel, Aalen, DE;
Carl Zeiss SMT, AG., Oberkochen, DE;
Abstract
There is provided an optical element module comprising a first optical element and an optical element holder. The first optical element has a first coefficient of thermal expansion. The optical element holder holds the first optical element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being adapted to the first coefficient of thermal expansion. The optical element is directly contacting the optical element holder in a wide contact area. The contact area is defined by a first contact surface of the first optical element and a second contact surface of the optical element holder, wherein the second contact surface matches the first contact surface. Thus, favorable rigidity and deformation behavior is provided.