The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
Jul. 31, 2008
Hans-artur Boesser, Breidenbach, DE;
Wolfgang Fricke, Netphen, DE;
Michael Heiden, Woelfershelm, DE;
Hans-Artur Boesser, Breidenbach, DE;
Wolfgang Fricke, Netphen, DE;
Michael Heiden, Woelfershelm, DE;
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Abstract
A system and a method for determining positions of structures on a substrate are disclosed. The system includes at least one measurement table () movable in the X-coordinate direction and in the Y-coordinate direction, a measurement objective () and a camera for determining the positions of the structures () on the substrate (). The position of the measurement objective () and/or the measurement table () may be determined by at least one interferometer (). The system is surrounded by a housing representing a climatic chamber () provided with an active pressure regulation.