The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
Sep. 18, 2007
Temperature control method, temperature control apparatus and high/low temperature processing system
Masataka Hatta, Nirasaki, JP;
Yoshinao Kono, Nirasaki, JP;
Toshikazu Ariyama, Nirasaki, JP;
Kazuki Hosaka, Nirasaki, JP;
Masataka Hatta, Nirasaki, JP;
Yoshinao Kono, Nirasaki, JP;
Toshikazu Ariyama, Nirasaki, JP;
Kazuki Hosaka, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A temperature control apparatus that controls a temperature of a target object by a heat exchange between a temperature control liquid and the target object. The apparatus includes a pressurizing unit that pressurizes the temperature control liquid to increase a boiling point thereof; a heating unit that increases a temperature of the temperature control liquid to become higher than or equal to a boiling point of the temperature control liquid observed at a normal pressure; and a heat exchanging unit that exchanges heat between the target object and the temperature control liquid whose temperature has been increased to become higher than or equal to the boiling point of the temperature control liquid observed at the normal pressure.