The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
Mar. 30, 2007
Michael Ravkin, Sunnyvale, CA (US);
John M. DE Larios, Palo Alto, CA (US);
Fred C. Redeker, Fremont, CA (US);
Mikhail Korolik, San Jose, CA (US);
Erik M. Freer, Campbell, CA (US);
Michael Ravkin, Sunnyvale, CA (US);
John M. de Larios, Palo Alto, CA (US);
Fred C. Redeker, Fremont, CA (US);
Mikhail Korolik, San Jose, CA (US);
Erik M. Freer, Campbell, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A proximity head including a head surface. The head surface including a first flat region and a plurality of first conduits. Each one of the plurality of first conduits being defined by corresponding one of a plurality of first discrete holes. The plurality of first discrete holes residing in the head surface and extending through the first flat region. The head surface also including a second flat region and a plurality of second conduits. The plurality of second conduits being defined by a corresponding plurality of second discrete holes that reside in the head surface and extend through the second flat region. The head surface also including a third flat region disposed between and adjacent to the first flat region and the second flat region and a plurality of third conduits. The plurality of third conduits being defined by a corresponding plurality of third discrete holes that reside in the head surface and extend through the third flat region. The third conduits being formed at a first angle relative to the third flat region. The first angle being between 30 and 60 degrees. A system and method for processing a substrate with a proximity head is also described.