The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2011
Filed:
Mar. 20, 2007
Mitsugu Sato, Hitachinaka, JP;
Katsuhiko Sakai, Tokyo, JP;
Atsushi Takane, Mito, JP;
Yoshihiko Nakayama, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Katsuhiko Sakai, Tokyo, JP;
Atsushi Takane, Mito, JP;
Yoshihiko Nakayama, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.