The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2011
Filed:
Feb. 08, 2007
Applicants:
Arno Jan Bleeker, Westerhoven, NL;
Kars Zeger Troost, Waalre, NL;
Inventors:
Arno Jan Bleeker, Westerhoven, NL;
Kars Zeger Troost, Waalre, NL;
Assignee:
ASML Netherland B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/72 (2006.01); G03B 27/42 (2006.01); G03B 27/54 (2006.01);
U.S. Cl.
CPC ...
Abstract
Lithographic apparatus using an array of individually controllable elements in which a fraction of the intensity of the beam of radiation patterned by the array of individually controllable elements is diverted to an image sensor for verifying the quality of the image generated.
Quick Actions:
Bleeker, Arno. (2011). Lithographic apparatus and device manufacturing method (U.S. Patent No. 7965380). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7965380
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