The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2011
Filed:
Apr. 04, 2004
Yair Ein-eli, Haifa, IL;
David Starosvetsky, Yokneam Ilit, IL;
Esta Abelev, Kiryat-Yam, IL;
Eugene Rabkin, Haifa, IL;
Yair Ein-Eli, Haifa, IL;
David Starosvetsky, Yokneam Ilit, IL;
Esta Abelev, Kiryat-Yam, IL;
Eugene Rabkin, Haifa, IL;
Technion Research & Development Foundation Ltd., Haifa, IL;
Abstract
A composition that rapidly passivates copper-containing surface to yield a uniform layer of insoluble copper oxide, the composition being useful in chemical-mechanical planarization of copper-containing surfaces is disclosed. The composition is a solution having a pH of equal to or greater than 9 and having an oxidation potential sufficient to oxidize the surface to form non-soluble copper oxides. Also disclosed are methods of making and using the composition.