The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
Jul. 29, 2008
Hans-artur Boesser, Breidenbach, DE;
Michael Heiden, Woelfersheim, DE;
Klaus-dieter Adam, Jena, DE;
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Abstract
A coordinate measuring machine () for measuring structures () on a substrate () including a measurement table () movable in the X-coordinate direction and in the Y-coordinate direction, a measurement objective (), at least one laser interferometer () for determining the position of the measurement table () and the measurement objective () wherein the measurement table (), the measurement objective () and the at least one laser interferometer () are arranged in a vacuum chamber ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile