The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
Mar. 03, 2010
Kuei Shun Chen, Hsin-Chu, TW;
Chin-hsiang Lin, Hsin-Chu, TW;
Vencent Chang, Hsinchu, TW;
Lawrence Lin, Zhubei, TW;
Lai Chien Wen, Hsinchu, TW;
Jhun Hua Chen, Chang Hua, TW;
Kuei Shun Chen, Hsin-Chu, TW;
Chin-Hsiang Lin, Hsin-Chu, TW;
Vencent Chang, Hsinchu, TW;
Lawrence Lin, Zhubei, TW;
Lai Chien Wen, Hsinchu, TW;
Jhun Hua Chen, Chang Hua, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
An integrated circuit device and method of making the integrated circuit device are disclosed. An exemplary apparatus includes: a semiconductor layer; and a dielectric layer on the semiconductor layer, the dielectric layer having conductive vias and dummy vias formed therein, wherein the conductive vias and dummy vias extend varying distances into the dielectric layer, the conductive vias extending through the dielectric layer to the semiconductor layer, and the dummy vias extending through the dielectric layer to a distance above the semiconductor layer.