The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
Oct. 23, 2008
Zhongwei Chen, San Jose, CA (US);
Weiming Ren, San Jose, CA (US);
Joe Wang, Campbell, CA (US);
Xuedong Liu, Cupertino, CA (US);
Juying Dou, San Jose, CA (US);
Fumin He, Beijing, CN;
Feng Cao, Beijing, CN;
Yan Ren, Beijing, CN;
Xiaoli Guo, Beijing, CN;
Wei He, Beijing, CN;
Qingpo Xi, Beijing, CN;
Zhongwei Chen, San Jose, CA (US);
Weiming Ren, San Jose, CA (US);
Joe Wang, Campbell, CA (US);
Xuedong Liu, Cupertino, CA (US);
Juying Dou, San Jose, CA (US);
Fumin He, Beijing, CN;
Feng Cao, Beijing, CN;
Yan Ren, Beijing, CN;
Xiaoli Guo, Beijing, CN;
Wei He, Beijing, CN;
Qingpo Xi, Beijing, CN;
Hermes-Microvision, Inc., Hsinchu, TW;
Abstract
The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review. The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis. The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.