The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2011
Filed:
Sep. 29, 2006
Chishio Koshimizu, Nirasaki, JP;
Tomohiro Suzuki, Nirasaki, JP;
Chishio Koshimizu, Nirasaki, JP;
Tomohiro Suzuki, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A stage onto which is electrostatically attracted a substrate to be processed in a substrate processing apparatus, which enables the semiconductor device yield to be improved. A temperature measuring apparatusmeasures a temperature of the substrate to be processed. A temperature control unitcarries out temperature adjustment on the substrate to be processed such as to become equal to a target temperature based on a preset parameter. A temperature control unitcontrols the temperature of the substrate to be processed by controlling the temperature adjustment by the temperature control unitbased on a measured temperature measured by the temperature measuring apparatus