The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2011
Filed:
Mar. 15, 2007
Michel Fransois Hubert Klaassen, Eindhoven, NL;
Hendrikus Robertus Marie Van Greevenbroek, Eindhoven, NL;
Bernd Geh, Scottsdale, AZ (US);
Emil Peter Schmitt-weaver, Selkirk, NY (US);
Michel Fransois Hubert Klaassen, Eindhoven, NL;
Hendrikus Robertus Marie Van Greevenbroek, Eindhoven, NL;
Bernd Geh, Scottsdale, AZ (US);
Emil Peter Schmitt-Weaver, Selkirk, NY (US);
Carl Zeiss SMT AG, Oberkochen, DE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An illuminator for a lithographic apparatus, the illuminator including an illumination mode defining element and a plurality of polarization modifiers, the polarization modifiers being moveable into or out of partial intersection with a radiation beam having an angular and spatial distribution as governed by an illumination mode defining element.