The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2011
Filed:
Aug. 14, 2008
Applicants:
Michael Heiden, Woelfersheim, DE;
Klaus Rinn, Heuchelheim, DE;
Andreas Schaaf, Mittenaar-Bicken, DE;
Inventors:
Michael Heiden, Woelfersheim, DE;
Klaus Rinn, Heuchelheim, DE;
Andreas Schaaf, Mittenaar-Bicken, DE;
Assignee:
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/00 (2006.01); G01J 1/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for reproducibly determining object characteristics is disclosed. Herein an object is imaged onto a detector by means of an imaging optics and detected thereon. A correction function k is applied to a brightness measuring result N originally detected by a detector in such a way, that a corrected brightness measuring result N' is proportional to a brightness I impinging on the detector.