The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2011
Filed:
Nov. 13, 2007
Applicants:
Jin-young Yoon, Seoul, KR;
Hyun-woo Kim, Gyeonggi-do, KR;
Chan Hwang, Seoul, KR;
Yun-kyeong Jang, Seoul, KR;
Inventors:
Jin-Young Yoon, Seoul, KR;
Hyun-Woo Kim, Gyeonggi-do, KR;
Chan Hwang, Seoul, KR;
Yun-Kyeong Jang, Seoul, KR;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
Provided herein are gettering members that include a monitor substrate and a conditioning layer thereon. Also provided herein are methods of forming gettering layers and methods of performing immersion lithography processes using the same.