The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Feb. 08, 2006
Joseph M. Ilardi, Sparta, NJ (US);
David C. Skee, Bethlehem, PA (US);
Sean M. Kane, Lyndhurst, OH (US);
Karen E. Trovalli, Easton, PA (US);
Joseph M. Ilardi, Sparta, NJ (US);
David C. Skee, Bethlehem, PA (US);
Sean M. Kane, Lyndhurst, OH (US);
Karen E. Trovalli, Easton, PA (US);
Avantor Performance Materials, Inc., Phillipsburg, NJ (US);
Abstract
Aqueous, silicate free, cleaning compositions of about pH 9 or below and method of using the cleaning compositions for cleaning microelectronic substrates, which compositions are able to essentially completely clean such substrates and produce essentially no metal corrosion of the metal elements of such substrates. The aqueous cleaning compositions of this invention have (a) water, (b) at least one of ammonium and quaternary ammonium ions and (c) at least one of hypophosphite (HPO) and/or phosphite (HPO) ions. The cleaning compositions also may contain fluoride ions. Optionally, the composition may contain other components such as organic solvents, oxidizing agent, surfactants, corrosion inhibitors and metal complexing agents.