The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2011
Filed:
Apr. 21, 2009
Masato Moriya, Hiratsuka, JP;
Tamotsu Abe, Hiratsuka, JP;
Takashi Suganuma, Hiratsuka, JP;
Hiroshi Someya, Hiratsuka, JP;
Takayuki Yabu, Hiratsuka, JP;
Akira Sumitani, Hiratsuka, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Masato Moriya, Hiratsuka, JP;
Tamotsu Abe, Hiratsuka, JP;
Takashi Suganuma, Hiratsuka, JP;
Hiroshi Someya, Hiratsuka, JP;
Takayuki Yabu, Hiratsuka, JP;
Akira Sumitani, Hiratsuka, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Gigaphoton Inc., Tokyo, JP;
Abstract
An EUV light source apparatus capable of easily detecting deterioration etc. of a window of an EUV light generating chamber. The EUV light source apparatus includes a driver laser, an EUV light generating chamber, a window which passes the laser beam into the EUV light generating chamber, an EUV light collector mirror, laser beam focusing optics which focuses a laser beam onto a trajectory of a target material, a temperature sensor which detects a temperature of the window, and a laser beam optics deterioration determination processing unit which determines deterioration of the window based on the temperature of the window detected by the temperature sensor when extreme ultra violet light is generated.