The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2011
Filed:
Aug. 13, 2008
Youichi Ohsawa, Joetsu, JP;
Takeru Watanabe, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Katsuhiro Kobayashi, Joetsu, JP;
Youichi Ohsawa, Joetsu, JP;
Takeru Watanabe, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Katsuhiro Kobayashi, Joetsu, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Abstract
Sulfonate salts have the formula: CF—CH(OCOR)—CFSOMwherein R is C-Calkyl or C-Caryl, and Mis a lithium, sodium, potassium, ammonium or tetramethylammonium ion. Onium salts, oximesulfonates and sulfonyloxyimides and other compounds derived from these sulfonate salts are effective photoacid generators in chemically amplified resist compositions.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile