The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Aug. 01, 2008
Sanae Furuya, Kawasaki, JP;
Takayoshi Mori, Kawasaki, JP;
Takahiro Dazai, Kawasaki, JP;
Ryoichi Takasu, Kawasaki, JP;
Tomoyuki Hirano, Kawasaki, JP;
Sanae Furuya, Kawasaki, JP;
Takayoshi Mori, Kawasaki, JP;
Takahiro Dazai, Kawasaki, JP;
Ryoichi Takasu, Kawasaki, JP;
Tomoyuki Hirano, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A resist composition for immersion exposure including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid, an acid-generator component (B) which generates acid upon irradiation, and a fluorine-containing compound (C) having a group represented by general formula (c) shown below and containing at least one fluorine atom: wherein Q represents a group in which one hydrogen atom has been removed from a monovalent hydrophilic group; and Rrepresents a hydrocarbon group of 2 or more carbon atoms which may have a fluorine atom.