The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2011
Filed:
Mar. 27, 2009
Applicants:
Cheng-qun Gui, Best, NL;
Arno Jan Bleeker, Westerhoven, NL;
Pieter Willem Herman DE Jager, Rotterdam, NL;
Inventors:
Cheng-Qun Gui, Best, NL;
Arno Jan Bleeker, Westerhoven, NL;
Pieter Willem Herman De Jager, Rotterdam, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/42 (2006.01); G03B 27/52 (2006.01); G03B 27/32 (2006.01); G02B 26/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
Provided is a method and system for facilitating use of a plurality of individually controllable elements to modulate the intensity of radiation received at each focusing element of an array of focusing elements to control the intensity of the radiation in the areas on the substrate onto which the focusing elements direct the radiation.