The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2011

Filed:

Nov. 04, 2008
Applicants:

Blaine D. Johs, Lincoln, NE (US);

Steven E. Green, Lincoln, NE (US);

Craig M. Herzinger, Lincoln, NE (US);

Duane E. Meyer, Lincoln, NE (US);

Martin M. Liphardt, Lincoln, NE (US);

Inventors:

Blaine D. Johs, Lincoln, NE (US);

Steven E. Green, Lincoln, NE (US);

Craig M. Herzinger, Lincoln, NE (US);

Duane E. Meyer, Lincoln, NE (US);

Martin M. Liphardt, Lincoln, NE (US);

Assignee:

J.A. Woollam Co., Inc., Lincoln, NE (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01); G02B 5/30 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.


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