The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Jan. 16, 2008
Michael Heiden, Wolfersheim, DE;
Michael Heiden, Wolfersheim, DE;
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Abstract
A device for determining the position of a structure () on an object () in relation to a coordinate system is disclosed. The object () is placed on a measuring table () which is movable in one plane (), wherein a block () defines the plane (). At least one optical arrangement (,) is provided for transmitted light illumination and/or reflected light illumination. The optical arrangement (,) comprises an illumination apparatus (,) for reflected light illumination and/or transmitted light illumination and at least one first or second optical element (,), wherein at least part of the at least one optical element (,) extends into the space () between the block () and an optical system support (). The block () and/or the optical system support () separates the illumination apparatus (,) spatially from the plane () in which the measuring table () is movable.