The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Feb. 10, 2009
Stephen R. Hooper, Mesa, AZ (US);
James D. Macdonald, Chandler, AZ (US);
William G. Mcdonald, Payson, AZ (US);
Stephen R. Hooper, Mesa, AZ (US);
James D. MacDonald, Chandler, AZ (US);
William G. McDonald, Payson, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A method and apparatus are described for fabricating an exposed backside pressure sensor () which protects interior electrical components () formed on a topside surface of a pressure sensor transducer die () from corrosive particles using a protective gel layer () and molding compound (), but which vents a piezoresistive transducer sensor diaphragm () formed on a backside of the pressure sensor transducer die () through a vent hole () formed in an exposed die flag (), enabling the sensor diaphragm () to directly sense pressure variations without the influence of a protective gel.