The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2011
Filed:
Jul. 03, 2008
Bang-chiang Lan, Taipei, TW;
Li-hsun Ho, Hsinchu County, TW;
Wei-cheng Wu, Hsinchu County, TW;
Hui-min Wu, Changhua County, TW;
Min Chen, Taipei County, TW;
Chien-hsin Huang, Taichung, TW;
Ming-i Wang, Taipei County, TW;
Bang-Chiang Lan, Taipei, TW;
Li-Hsun Ho, Hsinchu County, TW;
Wei-Cheng Wu, Hsinchu County, TW;
Hui-Min Wu, Changhua County, TW;
Min Chen, Taipei County, TW;
Chien-Hsin Huang, Taichung, TW;
Ming-I Wang, Taipei County, TW;
United Microelectronics Corp., Science-Based Industrial Park, Hsin-Chu, TW;
Abstract
A MEMS device includes a vent hole structure and a MEMS structure disposed on a same side of a substrate. The vent hole structure adjoins the MEMS structure with an etch stop structure therebetween. The MEMS structure includes a chamber, the vent hole structure includes a metal layer having at least a hole thereon as a vent hole to connect the chamber of the MEMS structure through the etch stop structure. Accordingly, the MEMS device has a lateral vent hole. Furthermore, as the vent hole structure and the MEMS structure are disposed on the same side of the substrate, the manufacturing process is convenient and timesaving.