The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2011
Filed:
Dec. 15, 2008
Theodorus Simon Josef Lammerink, Enschede, NL;
Marcel Dijkstra, Enschede, NL;
Jeroen Haneveld, Lochem, NL;
Remco John Wiegerink, Hengelo, NL;
Theodorus Simon Josef Lammerink, Enschede, NL;
Marcel Dijkstra, Enschede, NL;
Jeroen Haneveld, Lochem, NL;
Remco John Wiegerink, Hengelo, NL;
Berkin B.V., Ruurlo, NL;
Abstract
A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.