The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
May. 01, 2008
Scott M Mansfield, Hopewell Junction, NY (US);
Geng Han, Fishkill, NY (US);
Jason E Meiring, New Fairfield, CT (US);
Dario Gil, Katonah, NY (US);
Scott M Mansfield, Hopewell Junction, NY (US);
Geng Han, Fishkill, NY (US);
Jason E Meiring, New Fairfield, CT (US);
Dario Gil, Katonah, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Embodiments of the present invention provide a method for performing lumped-process model calibration. The method includes creating a plurality of sub-process models for a set of sub-processes; creating a lumped-process-model incorporating said set of sub-processes; calculating a first set of output patterns from a set of test patterns by using said plurality of sub-process models; calculating a second set of output patterns from said set of test patterns by using said lumped-process-model; and adjusting process parameters used in said lumped-process-model to calculate said second set of output patterns to match said first set of output patterns. A computer system for performing the lumped-process model calibration is also provided.