The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2011
Filed:
Jul. 05, 2007
Tsuneyuki Okabe, Hanamaki, JP;
Yoji Mori, Gifu, JP;
Takeya Inagaki, Kasugai, JP;
Akihito Sugino, Inuyama, JP;
Tsuneyuki Okabe, Hanamaki, JP;
Yoji Mori, Gifu, JP;
Takeya Inagaki, Kasugai, JP;
Akihito Sugino, Inuyama, JP;
CKD Corporation, Komaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
To provide a purge gas unit and a purge gas supply integrated unit having a smaller foot space, the purge gas unit comprises an input block for input of purge gas into the purge gas unit, the input block including a purge passage formed through the input block to provide an opening in a side surface of the input block and an input passage formed branching off from the purge passage; an output block for output of the purge gas from the purge gas unit; a communication block connected to the input block and the output block to provide communication between the input block and the output block.