The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2011
Filed:
Dec. 12, 2007
Applicant:
Pavel Izikson, Haifa, IL;
Inventor:
Pavel Izikson, Haifa, IL;
Assignee:
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G06F 15/18 (2006.01); G06E 1/00 (2006.01); G06E 3/00 (2006.01); G06G 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Apparatus and methods are provided for predicting a plurality of unknown parameter values (e.g. overlay error or critical dimension) using a plurality of known parameter values. In one embodiment, the method involves training a neural network to predict the plurality of parameter values. In other embodiments, the prediction process does not depend on an optical property of a photolithography tool. Such predictions may be used to determine wafer lot disposition.