The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2011
Filed:
Jul. 18, 2007
Applicants:
Johan Maria Van Boxmeer, Sint Oedenrode, NL;
Henricus Petrus Maria Pellemans, Veldhoven, NL;
Robert Franken, Deurne, NL;
Inventors:
Johan Maria Van Boxmeer, Sint Oedenrode, NL;
Henricus Petrus Maria Pellemans, Veldhoven, NL;
Robert Franken, Deurne, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G02B 27/40 (2006.01);
U.S. Cl.
CPC ...
Abstract
A scatterometer has a focus sensor arranged to detect whether the target being measured is in a correct focal plane. A modulation is applied to a component of the focus sensor or the scatterometer such that a defocus as measured by the focus sensor varies according to a certain function. From knowledge of the modulation, the gain of the sensor can be calibrated.