The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2011
Filed:
Dec. 11, 2008
Christopher Kimball, Fremont, CA (US);
Eric Hudson, Berkeley, CA (US);
Douglas Keil, Fremont, CA (US);
Alexei Marakhtanov, Albany, CA (US);
Christopher Kimball, Fremont, CA (US);
Eric Hudson, Berkeley, CA (US);
Douglas Keil, Fremont, CA (US);
Alexei Marakhtanov, Albany, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A plasma probe assembly for use in a plasma processing chamber is provided. A semiconductor probe element with a probe surface at a first end of the semiconductor probe element is provided. An electrical connector is electrically connected to the semiconductor probe element. An electrically insulating sleeve surrounds at least part of the probe element. An adjustment device is connected to the semiconductor probe so that the probe surface is coplanar with an interior chamber surface of the plasma processing chamber.