The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2011
Filed:
Sep. 12, 2008
Applicants:
Chanmin Su, Ventura, CA (US);
Sergey Belikov, Goleta, CA (US);
Inventors:
Chanmin Su, Ventura, CA (US);
Sergey Belikov, Goleta, CA (US);
Assignee:
Veeco Metrology Inc., Santa Barbara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 10/06 (2010.01); G01Q 30/04 (2010.01); G01Q 30/06 (2010.01);
U.S. Cl.
CPC ...
Abstract
A method of operating a scanning probe microscope (SPM) includes scanning a sample as a probe of the SPM interacts with a sample, and collecting sample surface data in response to the scanning step. The method identifies a feature of the sample from the sample surface data and automatically performs a zoom-in scan of the feature based on the identifying step. The method operates to quickly identify and confirm the location of features of interest, such as nano-asperities, so as to facilitate performing a directed high resolution image of the feature.