The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2011
Filed:
May. 16, 2006
Krishnamurthy Bhaskar, San Jose, CA (US);
Mark J. Roulo, Mountain View, CA (US);
John S. Taylor, San Jose, CA (US);
Lawrence R. Miller, Los Altos, CA (US);
Paul T. Russell, Scotts Valley, CA (US);
Jason Z. Lin, Saratoga, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
Richard M. Wallingford, San Jose, CA (US);
Kishore Bubna, Fremont, CA (US);
Krishnamurthy Bhaskar, San Jose, CA (US);
Mark J. Roulo, Mountain View, CA (US);
John S. Taylor, San Jose, CA (US);
Lawrence R. Miller, Los Altos, CA (US);
Paul T. Russell, Scotts Valley, CA (US);
Jason Z. Lin, Saratoga, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
Richard M. Wallingford, San Jose, CA (US);
Kishore Bubna, Fremont, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node includes memory sufficient to buffer the data until it can process the data. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports. A job manager is coupled to the second network, receives the reports, and sends information to the process nodes to coordinate processing of the data.