The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2010
Filed:
Jun. 20, 2008
Applicants:
Stefan Philip Christiaan Belfroid, Delft, NL;
Nicolaas Ten Kate, Almkerk, NL;
Nicolaas Rudolf Kemper, Eindhoven, NL;
Johannes Petrus Maria Smeulers, Zwijndrecht, NL;
Arno Willem Frederik Volker, Delft, NL;
Rene Breeuwer, Delft, NL;
Inventors:
Stefan Philip Christiaan Belfroid, Delft, NL;
Nicolaas Ten Kate, Almkerk, NL;
Nicolaas Rudolf Kemper, Eindhoven, NL;
Johannes Petrus Maria Smeulers, Zwijndrecht, NL;
Arno Willem Frederik Volker, Delft, NL;
Rene Breeuwer, Delft, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/42 (2006.01); G03B 27/32 (2006.01); G03C 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
In an immersion lithography apparatus, ultrasonic waves are used to atomize liquid on a surface of the substrate.