The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2010
Filed:
Sep. 02, 2008
Bang-chiang Lan, Taipei, TW;
Ming-i Wang, Taipei County, TW;
Li-hsun Ho, Hsinchu County, TW;
Hui-min Wu, Changhua County, TW;
Min Chen, Taipei County, TW;
Chien-hsin Huang, Taichung, TW;
Tzung-i Su, Yunlin County, TW;
Bang-Chiang Lan, Taipei, TW;
Ming-I Wang, Taipei County, TW;
Li-Hsun Ho, Hsinchu County, TW;
Hui-Min Wu, Changhua County, TW;
Min Chen, Taipei County, TW;
Chien-Hsin Huang, Taichung, TW;
Tzung-I Su, Yunlin County, TW;
United Microelectronics Corp., Hsinchu, TW;
Abstract
A microelectromechanical system (MEMS) structure and a fabricating method thereof are described. The MEMS structure includes a fixed part and a movable part. The fixed part is disposed on and connects with a substrate. The movable part including at least two first metal layers, a first protection ring and a first dielectric layer is suspended on the substrate. The first protection ring connects two adjacent first metal layers, so as to define a first enclosed space between the two adjacent first metal layers. The first dielectric layer is disposed in the enclosed space and connects the two adjacent first metal layers.