The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2010
Filed:
Feb. 06, 2008
Noritsugu Takahashi, Kokubunji, JP;
Muneyuki Fukuda, Kokubunji, JP;
Hiroyuki Ito, Hitachinaka, JP;
Atsuko Fukada, Kokubunji, JP;
Masashi Sakamoto, Hitachinaka, JP;
Satoshi Takada, Hitachinaka, JP;
Noritsugu Takahashi, Kokubunji, JP;
Muneyuki Fukuda, Kokubunji, JP;
Hiroyuki Ito, Hitachinaka, JP;
Atsuko Fukada, Kokubunji, JP;
Masashi Sakamoto, Hitachinaka, JP;
Satoshi Takada, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A technology whereby removal of magnetic hysteresis is enabled in short time in parallel with a process for stage transfer, and so forth. There is executed a magnetic hysteresis removal sequence whereby current for exciting an electromagnetic coil prior to acquisition of an image is always set to a predetermined variation value against a target value, thereby obtaining information on an image, and so forth, when a diameter of a primary electron beam, converged on the specimen, becomes smaller than dimensions displayed by one pixel of an image to be acquired.