The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Jul. 30, 2008
Hans-joachim Barth, Munich, DE;
Petra Felsner, Munich, DE;
Erdem Kaltalioglu, Hsin-Chu, TW;
Gerald R. Friese, Munich, DE;
Hans-Joachim Barth, Munich, DE;
Petra Felsner, Munich, DE;
Erdem Kaltalioglu, Hsin-Chu, TW;
Gerald R. Friese, Munich, DE;
Infineon Technologies AG, Munich, DE;
Abstract
An embodiment of a MIM capacitor includes a first insulating layer formed over a wafer and a first capacitor plate formed over the wafer within the first insulating layer. The MIM capacitor further includes a second insulating layer formed over the first insulating layer, a capacitor dielectric formed over the first capacitor plate within the second insulating layer and a second capacitor plate formed over the capacitor dielectric within the second insulating layer. A recess is formed in the second capacitor plate below an upper surface of the second insulating layer and a catalytic activation layer is formed in the recess.