The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Aug. 22, 2007
Rolf Seltmann, Dresden, DE;
Bernd Schulz, Radebeul, DE;
Fritjof Hempel, Langerbrueck, DE;
Uwe Schulze, Dresden, DE;
Rolf Seltmann, Dresden, DE;
Bernd Schulz, Radebeul, DE;
Fritjof Hempel, Langerbrueck, DE;
Uwe Schulze, Dresden, DE;
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
By taking into consideration tool-specific distortion signatures and reticle-specific placement characteristics in an alignment control system, the control quality of sophisticated APC strategies may be significantly enhanced. Respective correction data may be established on the basis of any combinations of tool/reticles and layers to be aligned to each other, which may modify the respective target values of alignment parameters used for controlling the alignment process on the basis of standard overlay measurement data obtained from dedicated overlay marks.