The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Jun. 15, 2007
Gert-jan Heerens, Schoonhoven, NL;
Bastiaan Lambertus Wilhelmus Marinus Van DE Ven, Den Bosch, NL;
Gert-Jan Heerens, Schoonhoven, NL;
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Den Bosch, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A system for use in a lithographic apparatus includes an assembly of a reticle and a reticle holder. The reticle includes a marker. The system also includes a position detector arranged to detect the reticle marker to position the reticle with respect to the reticle holder, and a storage container constructed and arranged to store the assembly during the positioning of the reticle with respect to the reticle holder. The reticle holder and the detector are arranged to be kinematically aligned with respect to each other.