The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Aug. 14, 2006
Applicants:
Guangxiang Jin, San Jose, CA (US);
Padmapani Nallan, San Jose, CA (US);
Ajay Kumar, Sunnyvale, CA (US);
Inventors:
Guangxiang Jin, San Jose, CA (US);
Padmapani Nallan, San Jose, CA (US);
Ajay Kumar, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of etching high dielectric constant materials using a halogen gas, a reducing gas and an etch rate control gas chemistry.