The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Jun. 06, 2008
Shunichi Aiyoshizawa, Tokyo, JP;
Ryuichi Kosuge, Tokyo, JP;
Ryo Kato, Tokyo, JP;
Yu Ishii, Tokyo, JP;
Shunichi Aiyoshizawa, Tokyo, JP;
Ryuichi Kosuge, Tokyo, JP;
Ryo Kato, Tokyo, JP;
Yu Ishii, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The present invention provides an apparatus for heating or cooling a polishing surface. This apparatus includes a heat exchanger arranged so as to face the polishing surface when the workpiece is polished. The heat exchanger includes a medium passage through which a heat-exchanging medium flows, and a bottom surface facing the polishing surface. At least a part of the bottom surface is inclined with an upward gradient above the polishing surface such that a polishing liquid on the polishing surface generates a lift exerted on the bottom surface during movement of the polishing surface.