The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2010
Filed:
Oct. 25, 2007
Applicants:
Alan Brodie, Palo Alto, CA (US);
Mehran Nasser-ghodsi, Hamilton, MA (US);
Ming Yu, Fremont, CA (US);
Inventors:
Alan Brodie, Palo Alto, CA (US);
Mehran Nasser-Ghodsi, Hamilton, MA (US);
Ming Yu, Fremont, CA (US);
Assignee:
KLA-Tencor Technologies Corporation, San Jose, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 9/00 (2006.01); H01J 9/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for sharpening a metal carbide emitter tip is disclosed. The metal carbide emitter tip is exposed to an oxygen rich, low vacuum environment when the metal carbide emitter tip is at a first temperature. The metal carbide emitter tip is rapidly heated to a higher second temperature at regular intervals of time.