The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2010
Filed:
Jul. 16, 2007
Taro Yamamoto, Koshi, JP;
Hitoshi Kosugi, Koshi, JP;
Yoshiaki Yamada, Tokyo, JP;
Yasuhito Saiga, Tokyo, JP;
Taro Yamamoto, Koshi, JP;
Hitoshi Kosugi, Koshi, JP;
Yoshiaki Yamada, Tokyo, JP;
Yasuhito Saiga, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A circulation system for a high refractive index liquid includes a first collecting section configured to collect a high refractive index liquid used in an immersion light exposure section; a first supply section configured to supply the high refractive index liquid collected in the first collecting section to a cleaning section as a cleaning liquid; a second collecting section configured to collect the high refractive index liquid used in the cleaning section; and a second supply section configured to supply the high refractive index liquid collected in the second collecting section to the immersion light exposure section, wherein the high refractive index liquid is circulated between the immersion light exposure section and the cleaning section.