The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2010
Filed:
Jan. 19, 2007
Zhong Xiang, Edison, NJ (US);
Hengpeng Wu, Hillsborough, NJ (US);
Hong Zhuang, Raritan, NJ (US);
Eleazar Gonzalez, Bloomfield, NJ (US);
Mark O. Neisser, Whitehouse Station, NJ (US);
Zhong Xiang, Edison, NJ (US);
Hengpeng Wu, Hillsborough, NJ (US);
Hong Zhuang, Raritan, NJ (US);
Eleazar Gonzalez, Bloomfield, NJ (US);
Mark O. Neisser, Whitehouse Station, NJ (US);
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
The invention relates to an antireflective coating composition capable of being coated beneath a photoresist layer, where the antireflective coating composition comprises a polymeric crosslinker and a solvent mixture, where the solvent mixture comprises at least one primary organic solvent and at least one secondary organic solvent selected from any of structures 1, 2 and 3, where, R, R, and R, are selected from H and C-Calkyl, and R, R, R, R, R, and Rare selected from C-Calkyl, and n=1-5. The invention also relates to an antireflective coating composition capable of being coated beneath a photoresist layer, where the antireflective coating composition comprises a polymeric crosslinker and a solvent mixture, where the solvent mixture comprises at least 2 organic solvents, and where the antireflective coating composition has a liquid particle count at 0.2 micron of less than 100/ml after accelerated aging.