The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2010
Filed:
Aug. 28, 2008
Applicants:
Keiichi Nakamoto, Osaka, JP;
Yuichiro Sasaki, Osaka, JP;
Katsumi Okashita, Osaka, JP;
Bunji Mizuno, Nara, JP;
Inventors:
Keiichi Nakamoto, Osaka, JP;
Yuichiro Sasaki, Osaka, JP;
Katsumi Okashita, Osaka, JP;
Bunji Mizuno, Nara, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/52 (2006.01);
U.S. Cl.
CPC ...
Abstract
An amount of leakage of a substrate-cooling gas into a vacuum container is measured by using a flow-rate measuring device so that the flow rate of a diluting gas that is the same as the substrate-cooling gas is controlled by a control device or a plasma doping time is prolonged, in accordance with the amount of leakage.